Sputtering Target for Thin Film Solar Cell

AZO, ZnO, GZO Targets

AZO, ZnO, GZO Rotary Target

• Transparent conductive, aluminum-doped and undoped AZO (ZnO) target for use in displays, touch screens, solar cell, OLED and other thin film applications.

Product specification

1. Chemical Data

• Composition
  AZO target : Standard is 98wt% ZnO + 2wt% Al2O3,
  (consistent to within± 0.5 wt%)
  ZnO target : ≥99.99wt% Zinc Oxide
  GZO Target : The ratio is flexible upon by Customer
• Purity : ≥ 99.99%

2. Physical Data

• Density : ANP’s AZO & ZnO target has the high density of >99.5% of the theoretical density
  GZO Target has the high Density >99%
• Appearance : Planar or Cylinder
• Size : Different sizes and Shapes for Customer's needs
• Target Surface Resistivity : 5x10-3 Ω/square

3. Product Characteristics

• High Transparence : > 85%
• No or Little Time Dependency of Physical Properties
• No or Little Scattering Particles during Evaporation
• Rare occurrence of crack development during Evaporation

4. Data of Sheet Resistance vs. Thickness for AZO*

Product Applications

• Transparent Conductive Electrode for Thin Film Solar Cell