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Material of CMP Slurry
Silicon Oxide Scratch Properties | |||||
---|---|---|---|---|---|
Scratch size | 0.4∼0.5 | 0.5∼1.0 | 1.0∼28 | S/C | Total |
ANP | 0.26 | 0.17 | 0.17 | 0.67 | 0.19 |
Competitor | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 |